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Research Article

Investigation on lamb wave propagation in silicon wafer using large aperture line-focused transducer

대구경 선집속 탐촉자를 이용한 실리콘 웨이퍼에서의 램파 전파 특성 분석

Yoonjae Chung1
,
Seung Soo Yang1
,
Minjae Yu1
,
Young H. Kim1∗
정 윤재1
,
양 승수1
,
유 민재1
,
김 영환1∗
1KAIST 부설 한국과학영재학교 응용음향학 연구실
∗Corresponding Author
31 July 2018. pp. 174-180
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Abstract

In this study, the propagation characteristics of Lamb waves in anisotropic silicon wafers of (100) and (111) direction were investigated by PVDF (Polyvinylidene Fluoride) line-focused transducer. The modified V(f,z) method was used because the Lamb waves are dispersive. For confirming the anisotropy, a line-focused transducer was used and the silicon wafer was rotated 180 degrees at intervals of 1 degree. As a result, A0 and S0 modes were observed. The speed of S0 mode according to propagation direction showed anisotropy which is associated with the crystal structure, and the speed of A0 mode was isotropic. The result is consistent with the crystal structure of silicon and the mechanism of vibration of each Lamb wave modes.

Keywords
Lamb wave
Anisotropy
PVDF (Polyvinylidene Fluoride)
Line-focused transducer
Silicon wafer

본 연구에서는 이방성 매질인 (100), (111) 방향의 실리콘 웨이퍼에서 램파의 전파 특성을 PVDF(Polyvinylidene Fluoride) 선집속 탐촉자를 이용하여 분석하였다. 램파가 분산성을 가지기 때문에 탐촉자와 시편 사이의 거리 z를 바꿔가며 측정하는 V(f,z)방법을 변형하여 사용하였다. 또한 이방성을 확인하기 위해 선집속 탐촉자가 사용되었고, 실리콘 웨이퍼를 1° 간격으로 180° 회전시켜 측정하였다. 실험 결과, A0 모드와 S0 모드를 확인할 수 있었다. S0 모드의 속력 분포에서 각 결정 방향의 구조와 연관된 이방성을 확인할 수 있었고, A0 모드의 속력은 등방성으로 나타났다. 이는 실리콘의 결정구조와 램파의 각 모드의 진동양상과 부합하는 결과이다.

키워드
램파
이방성
PVDF (Polyvinylidene Fluoride)
선집속 탐촉자
실리콘 웨이퍼
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Information
  • Publisher :The Acoustical Society of Korea
  • Publisher(Ko) :한국음향학회
  • Journal Title :The Journal of the Acoustical Society of Korea
  • Journal Title(Ko) :한국음향학회지
  • Volume : 37
  • No :4
  • Pages :174-180
  • Received Date : 2018-03-22
  • Accepted Date : 2018-07-19
  • DOI :https://doi.org/10.7776/ASK.2018.37.4.174
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