Design of piezoelectric micro-machined ultrasonic transducer for wideband ultasonic radiation in air

Hongmin Ahn; JaeHyeok Jin; Wonkyu Moon

doi:10.7776/ASK.2020.39.2.087

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2020 Vol.39, Issue 2 Preview Page Next Page

Research Article

Design of piezoelectric micro-machined ultrasonic transducer for wideband ultasonic radiation in air 공기 중 광대역 초음파 방사용 압전 박막 기반 초소형 초음파 트랜스듀서의 설계

31 March 2020. pp. 87-97

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Abstract

In this paper, the design of piezoelectric Micro-machined Ultrasonic Transducer (pMUT) for wideband ultrasonic radiation in air was investigated. One of the methods to achieve wide frequency bandwidth in single device is modeling the transducer to multi-resonance system. The new pMUT was designed as a multi-resonance system with the addition of a suitable acoustic structure to the front and back of a thin film structure. A new pMUT consisting of thin film parts, radiation parts, and packaging parts is designed with a Lumped Parameter Model (L.P.M). Finally, it was validated as a Finite Element Method (FEM) simulation. The final designed pMUT achieved a frequency band of 102 kHz ~ 132 kHz (-3 dB).

Keywords

Wideband

Piezoelectric ultrasonic micro-machined transducer

piezoelectric Micro-machined Ultrasonic Transducer (pMUT)

Wideband transducer design

Micromachined transducer

본 논문에서는 공기 중 광대역 초음파 방사용 압전 박막 기반 초소형 초음파 트랜스듀서(piezoelectric Micro-machined Ultrasonic Transducer, pMUT)의 설계 연구가 진행되었다. 하나의 트랜스듀서로 광대역을 달성하는 방법 중 하나는 다공진 시스템으로 설계하는 것이다. 새로운 pMUT은 박막 구조의 앞면과 뒷면에 적절한 음향 구조를 추가하여 다공진 시스템을 구현하도록 설계되었다. 박막 앞쪽은 도파관 구조로 모델링된 방사 파트로, 박막 뒷쪽은 음향 공동으로 모델링된 패키징 파트로 이루어져있다. 박막 파트, 방사 파트, 패키징 파트로 구성된 새로운 pMUT은 집중 변수 모델로 설계되었으며, 최종적으로 유한요소해석으로 검증되었다. 최종 설계된 pMUT은 102 kHz ~ 132 kHz (-3 dB)의 주파수 대역을 달성하였다.

키워드

광대역

압전기반 초소형 초음파 트랜스듀서

piezoelectric Micro-machined Ultrasonic Transducer (pMUT)

광대역 트랜스듀서 설계

미세공정기반 트랜스듀서

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Information

Publisher :The Acoustical Society of Korea
Publisher(Ko) :한국음향학회
Journal Title :The Journal of the Acoustical Society of Korea
Journal Title(Ko) :한국음향학회지
Volume : 39
No :2
Pages :87-97
Received Date : 2019-12-12
Revised Date : 2019-12-27
Accepted Date : 2020-01-11
DOI :https://doi.org/10.7776/ASK.2020.39.2.087

The Journal of the Acoustical Society of Korea ISSN:1225-4428(Print) 2287-3775(Online) 한국음향학회지

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